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>> Outline >> Features >> Products >> Example of Installation TOP >> Product Information [Outline] >> Powder Removal from Gas [Features] 　TRAPPACK Features   Element Type Coil Type Combination Type Appearance & Construction TRAPPACK Element ○ ― ○ Coil Element ― ○ ○ Installation Areas Fore line, Exhaust Fore line, Exhaust Exhaust Pressure Loss Very Little ≒0 Very Little  Uses  Applied Processes Implanting, Etching CVD, Etching CVD, Etching Gases BF3, AsH3, PH3 BCL3, CL2 SiH4, NH3, NF3 BCL3, CL2 SiH4, NH3, NF3 BCL3, CL2 　TRAPPACK Element The TRAPPACK Element is comprised of specially designed high function ion-exchange fibers, capable of adsorbing reactive generates (powder) to the fibers on the surface of the Element. We provide two different shapes of Elements, the cylindrically molded “TRAPPACK Element“ and the sheet type “Coil Element“. TRAPPACK Element Coil Element TRAPPACK Element The TRAPPACK Element is versatile and comes in a wide variety of shapes and densities. The Coil Element has several different models designed for NEW TRAPPACK Models 　Adsorption Mechanism and Performance   Function of Magnet Fiber   At the surface of the positive and negative ion-exchange fibers reactive generates (powders) are adsorbed. This causes the powder to build up on the magnet fibers, making them larger.   Used TRAPPACK Element   TRAPPACK Elements trap reactive generates (powder) at all points of the Element, causing it to become completely saturated with this powder. After an Element has been completely worn, the accumulated powder weighs more than 10 times the Elements original weight.   Used Coil Element   The Coil Element is installed in the coil construction (Coil Working Plate). The reactive generates (powder) in the exhaust gas, flow from the outside to the center where the powder repeatedly collides with the swirling coil. When the powder collides with the coil it is adsorbed and trapped. 　Features TRAPPACK Element   Removes fine reactive generates (powder) Low density and large mesh clearance. Powder is trapped on the surface and the inside of the Element. Coil Element   Due to the coils construction, powder cannot obstruct the gas The combination of multiple coils and pitches almost shuts out all powder Adsorbed powder molecules magnetically absorb other powder molecules