｜Contact Us｜Site Map｜

>> Outline >> Features >> Products >> Comparison TOP >> Product Information [Outline] >> Powder Removal from Gas [Products] 　Products Taisei Giken's "TRAPPACK" is specially designed to remove contaminating powders from gas, with a variety of different models and types. The three main types that we offer are the Element Type, Coil Type, and Combination Type. We recommend the use of a TRAPPACK Cabinet to assure safe storage of the TRAPPACK allowing for it to remain in optimal condition. Element Type This model is capable of capturing 10 times its weight in powder through electrostatic adsorption. The Element gathers reactive generates (powder) through magnetism. Coil Type The Coil Element is attached to the Coil Structure (Coil Working Plate). The reactive generates contaminating the exhaust gas, are pulled through a swirling centrifugal flow where they are adsorbed and trapped whenever they make contact with the walls of the Element. Combination Type Combining the TRAPPACK Element and the Coil Element utilizes the benefits of both Elements, ensuring complete protection over a wider variety of situations. Element Details TRAPPACK (Element Type) Basic model for powder removal from gas flow Appearance/ Structure Features   Removes fine reactive generates (powder) The Element has a low density and the mesh clearance is large The powder is stacked in layers throughout the Element Primary Functions Specifications   Implanting     ・1st Element: TRAPPACK Element   Etching     ・2nd Element: None           ・Installation Side: Vacuum / Exhaust TU-KN100 (Element Type) Primary Function:  General Use Element Type:   DLL Joint Bore:   NW25 Size:   D90mm×H195mm Weight:   1.9kg TU-KN200 (Element Type) Primary Function:  General Use Element Type:   ELL Joint Bore:   NW40 Size:   D140mm×H210mm Weight:   4.6kg TU-KN500 (Element Type) Primary Function:  General Use Element Type:   GLL Joint Bore:   NW40 Size:   D210mm×H260mm Weight:   4.9kg TU-KN500W (Element Type) Primary Function:  Generally Use Element Type:   HLL Joint Bore:   NW40 Size:   D210mm×H390mm Weight:   6.8kg TU-200 (Element Type) Primary Function:  Implanting Element Type:   EL Joint Bore:   NW25 Size:   D210mm×H210mm Weight:   5.3kg TU-250 (Element Type) Primary Function:  Implanting Element Type:   FL Joint Bore:   NW40 Size:   D210mm×H295mm Weight:   6.5kg TU-500 (Element Type) Primary Function:  Implanting / Etching Element Type:   GL Joint Bore:   NW40 Size:   D300mm×H267mm Weight:   10.0kg TU-500W (Element Type) Primary Function:  Implanting / Etching Element Type:   HL Joint Bore:   NW40, NW50 Size:   D300mm×H415mm Weight:   13kg TU-1000 (Element Type) Primary Function:  Implanting / Etching Element Type:   GL Joint Bore:   NW40, NW50 Size:   D300mm×H555mm Weight:   16.5kg PAGE TOP NEW TRAPPACK (Coil Type) Advanced TRAPPACK capable of trapping very large amounts of fine powder Appearance/ Structure Features Due to the coils construction, powder does not affect the pressure until after very extensive use. By adjusting the number of coils and pitches, powder can be almost completely shut out. Powder is stacked in layers throughout the Element. Primary Functions Specifications CVD ・1st Element: Coil Element Etching ・2nd Element: None ・Installation Side: Vacuum / Exhaust TU-50LM /LMJ (Coil Type) Primary Function:  Etching / CVD Element Type:   ASD-50 Coil Joint Bore:   NW40, NW50 Size:   □370mm×H707mm Weight:   53kg / 68kg TU-65LM /LMJ (Coil Type) Primary Function:  Etching / CVD Element Type:   ASD-65 Coil Joint Bore:   NW40, NW50 Size:   □400mm×H1013mm Weight:   94kg / 99kg TU-85LM /LMJ (Coil Type) Primary Function:  Etching / CVD Element Type:   ASD-85 Coil Joint Bore:   NW40, NW50 Size:   □430mm×H1064mm Weight:   100kg / 115kg TU-95LM /LMJ (Coil Type) Primary Function:  Etching / CVD Element Type:   ASD-95 Coil Joint Bore:   NW40, NW50 Size:   □485mm×H1064mm Weight:   145kg / 160kg PAGE TOP NEW TRAPPACK (Combination Type) This is the advanced powder trap that combines coil type and element type Elements. Appearance and Structure Features Removes fine reactive generates (powder) Low Density Element with large mesh clearance The Powder is stacked in layers throughout the Element Primary Functions Specifications   CVD     ・1st Element: Coil Element   Etching     ・2nd Element: TRAPPACK Element           ・Installation Side: Vacuum / Exhaust TU-1500 / J (Combination Type) Primary Function:  Etching / CVD Element Type:   HL + Coil Joint Bore:   NW40, NW50 Size:   □370mm×H707mm Weight:   49kg / 65kg TU-3100 / J (Combination Type) Primary Function:  Etching / CVD Element Type:   IL + Coil Joint Bore:   NW40, NW50 Size:   □400mm×H1013mm Weight:   93kg / 98kg TU-4100 / J (Combination Type) Primary Function:  Etching / CVD Element Type:   KL + Coil Joint Bore:   NW40, NW50 Size:   □430mm×H1064mm Weight:   104kg / 147kg TU-5100 / J (Combination Type) Primary Function:  Etching / CVD Element Type:   KL + Coil Joint Bore:   NW40, NW50 Size:   □485mm×H1064mm Weight:   110kg / 127kg PAGE TOP TRAPPACK Cabinet Provides installed TRAPPACKS with safety functions such as pressure alarms, power breakers, and other functions. KA-1500 Primary Functions:   Semi-Conductor Processes Joint Bore:   NW40, NW50 Size:   W650mm × L450mm × H1060mm Weight:   56kg KA-3100 Primary Functions:   Semi-Conductor Processes Joint Bore:   NW40, NW50 Size:   W760mm × L480mm × H1450mm Weight:   82kg PAGE TOP